MAT SCI 223

Materials Science of Thin Films

Description: Lecture, four hours; outside study, eight hours. Requisites: courses 120, 131. Fabrication, structure, and property correlations of thin films used in microelectronics for data and information processing. Topics include film deposition, interfacial properties, stress and strain, electromigration, phase changes and kinetics, reliability. Letter grading.

Units: 4.0
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Tawei Chu

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Mark Goorsky

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Ariella Machness

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Rajinder Sandhu

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King-Ning Tu

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Jenn-Ming Yang

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