MAT SCI 222

Growth and Processing of Electronic Materials

Description: Lecture, four hours; outside study, eight hours. Requisites: courses 120, 130, 131. Thermodynamics and kinetics that affect semiconductor growth and device processing. Particular emphasis on fundamentals of growth (bulk and epitaxial), heteroepitaxy, implantation, oxidation. Letter grading.

Units: 4.0
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Dwight Streit

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