EL ENGR 222

Integrated Circuits Fabrication Processes

Description: Lecture, four hours; outside study, eight hours. Requisite: course 2. Principles of integrated circuits fabrication processes. Technological limitations of integrated circuits design. Topics include bulk crystal and epitaxial growth, thermal oxidation, diffusion, ion-implantation, chemical vapor deposition, dry etching, lithography, and metallization. Introduction of advanced process simulation tools. Letter grading.

Units: 4.0
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Subramanian Iyer

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