Description: Laboratory, four hours; outside study, five hours. Enforced requisite: course 101C. Enforced corequisite: course 104C. Series of experiments that emphasize basic engineering principles of semiconductor unit operations, including fabrication and characterization of semiconductor devices. Investigation of processing steps used to make CMOS devices, including wafer cleaning, oxidation, diffusion, lithography, chemical vapor deposition, plasma etching, and metallization. Hands-on device testing includes transistors, diodes, and capacitors. Letter grading.

Units: 3.0